DocumentCode :
3516492
Title :
UV direct-writing of metals on polyimide substrates
Author :
Ng, J.H.-G. ; Desmulliez, M. ; Lamponi, M. ; Moffat, B.G. ; Walker, A.C. ; McCarthy, A. ; Suyal, H. ; Prior, K.A. ; Hand, D.P.
Author_Institution :
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh
fYear :
2008
fDate :
1-4 Sept. 2008
Firstpage :
691
Lastpage :
694
Abstract :
Copper micro-patterns have been fabricated on polyimide substrates without the use of evaporation techniques or photoresist materials. A novel easy light-directed metal patterning method has been achieved by using a photoreactive polymer reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating. The interaction of UV light and MPEG in ethanol film enables the photoreduction of mobile silver ions previously incorporated within the surface-modified polyimide substrates. The silver nanoparticle patterns thus formed serve as a active catalytic seed layer for subsequent electroless copper plating. Narrow copper tracks with low resistivity close to that of bulk copper have been achieved.
Keywords :
copper; electroless deposition; evaporation; nanoparticles; photoresists; polymers; silver; Ag; Cu; UV direct-writing; UV light; catalytic seed layer; copper micropatterns; electroless copper plating; ethanol film; evaporation techniques; light-directed metal patterning method; methoxy poly(ethylene glycol); photoreactive polymer reducing agent; photoreduction; photoresist materials; silver ions; silver nanoparticle patterns; surface-modified polyimide substrates; thin film coating; Chemical technology; Coatings; Conductivity; Copper; Ethanol; Polyimides; Polymer films; Resists; Silver; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
Conference_Location :
Greenwich
Print_ISBN :
978-1-4244-2813-7
Type :
conf
DOI :
10.1109/ESTC.2008.4684434
Filename :
4684434
Link To Document :
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