Design and fabrication of SAW gas sensor with resonator structure

Author

Lee, Hea-Min ; Han, Deuk-Young ; Ahn, Hyungkeun

Author_Institution

Dept. of Electr., Kon-Kuk Univ., Seoul, South Korea

Volume

2

fYear

1997

fDate

25 -30 May 1997

Firstpage

1058

Abstract

In this paper, SAW (Surface Acoustic Wave) resonator is used to detect flammable and explosive gases. SAW resonators are designed by using COM (Coupled Mode) theory and made through IC fabrication processes. The gases used in this experiment are CH₄, and H ₂. Substrate of SAW device is 128° X rotated LiNbO₃. Resonant frequency of resonator is designed to match at 99.8 Hz. A dual resonator oscillator circuit, composed of reference SAW resonator and sensing SAW resonator is used to compensate for the effects of temperature and humidity. Finally, device performances have been examined and proved to be in excellent agreement with theoretical predictions

Keywords

coupled mode analysis; gas sensors; lithium compounds; surface acoustic wave resonators; surface acoustic wave sensors; 99.8 MHz; LiNbO₃; SAW gas sensor; coupled mode theory; dual resonator oscillator circuit; explosive gases; flammable gases; resonant frequency; resonator structure; Acoustic signal detection; Acoustic waves; Explosives; Fabrication; Flammability; Gas detectors; Gases; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on

Conference_Location

Seoul

Print_ISBN

0-7803-2651-2

Type

conf

DOI

10.1109/ICPADM.1997.616629

Filename

616629