DocumentCode
3517452
Title
Nonlinear spectroscopy and process monitoring of Si
Author
Downer, M.C. ; Aktsipetrov, O.A. ; Anderson, M.H. ; ter Beek, M. ; Dadap, Jerry I. ; Ekerdt, John G. ; Hu, X.F. ; Jiang, Yizhang ; Lee, Yu Seong ; Lim, Dong-Kuk ; Lowell, J.K. ; Mishina, E.D. ; Russell, N.M. ; Wilson, P.T. ; Xu, Zongben
Author_Institution
Center-for Synthesis, Growth and Analysis of Electronic Materials, University of Texas at Austin
Volume
11
fYear
1997
fDate
18-23 May 1997
Firstpage
487
Lastpage
487
Keywords
Epitaxial growth; Monitoring; Nonlinear optics; Optical harmonic generation; Optical pumping; Optical sensors; Optical surface waves; Polarization; Spectroscopy; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
0-7803-4125-2
Type
conf
DOI
10.1109/CLEO.1997.603483
Filename
603483
Link To Document