Robotic nanowire handling for prototypic NEMS devices

Author

Bartenwerfer, Malte ; Fatikow, Sergej

Author_Institution

Dept. of Comput. Sci., Univ. of Oldenburg, Oldenburg, Germany

fYear

2013

fDate

6-10 May 2013

Firstpage

1421

Lastpage

1426

Abstract

This paper presents the usage of a nanorobotic handling technique for the transfer of individual copper-nanowires with diameters between 150nm and 400nm and length of about 10 μm. Handling and assembly are inside the SEM and use electron beam induced deposition as well as focused ion beam milling. The handled nanowires are used to assembly a NEMS device, namely an electrostatic switch design, where the nanowire acts as switching contact. Working principle, reproducibility and specific values of the switches are investigated, as well as the conductivity of the nanowires themself.

Keywords

electron beam deposition; electrostatic devices; microassembling; microrobots; nanoelectromechanical devices; nanowires; robotic assembly; NEMS device assembly; SEM; electron beam induced deposition; electrostatic switch design; focused ion beam milling; individual copper nanowire transfer; nanorobotic handling technique; nanowire conductivity; prototypic NEMS devices; reproducibility; robotic nanowire handling; size 10 mum; size 150 nm to 400 nm; switching contact; Assembly; Electrodes; Materials; Nanoscale devices; Robots; Scanning electron microscopy; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation (ICRA), 2013 IEEE International Conference on

Conference_Location

Karlsruhe

ISSN

1050-4729

Print_ISBN

978-1-4673-5641-1

Type

conf

DOI

10.1109/ICRA.2013.6630757

Filename

6630757