Manufacturing lithography value/cost analysis

A long-term value/cost of ownership model is presented which examines those parameters which most significantly differentiate lithography equipment and influence product innovation and productivity. These parameters are stepper throughput, overlay, yield, utilization, process automation, and a future technology path. Available market specifications for these stepper parameters are used in the model for comparison. It is concluded that flexible upgradeable high-throughput steppers operating simultaneously at full performance specification result in the lowest manufacturing cost per good die