Title :
Noise characteristics of cold emission cathodes
Author :
Andreev, A. ; Knapek, A. ; Grmela, L. ; Sik, O.
Author_Institution :
Brno Univ. of Technol., Brno, Czech Republic
Abstract :
The paper presents the noise characteristics of microscopic cathode based on Schottky field emission. Schottky emission is considered to be the predominant electron source technology in actual focused electron beam equipment. For the ideal electron source, it is necessary to achieve following properties: small source size, low electron emission energy spread, angular intensity (an emission current per unit solid angle), low noise, long-term stability and a simple and low-cost operation. The noise spectroscopy in time and frequency domain is based on measuring cathode´s voltage noise density in ultra-high vacuum conditions (UHV) in order to avoid environment interaction with ions which are present in the vacuum chamber. The first part of the article describes basic concept of electronic noise together with the description of used cathodes. Second part focuses on the method of measurement and in the last part, reached results are presented together with suitable explanation according to the concept of electronic noise.
Keywords :
1/f noise; cathodes; electron field emission; focused ion beam technology; 1/f noise; Schottky field emission; angular intensity; cathode voltage noise density; cold emission cathodes; electron source technology; electronic noise; focused electron beam equipment; frequency domain; generation-recombination noise; low electron emission energy; microscopic cathode; noise characteristics; noise spectroscopy; ultrahigh vacuum conditions; vacuum chamber; Cathodes; Etching; Noise; Noise measurement; Springs; Voltage measurement; Wire;
Conference_Titel :
Electronics Technology (ISSE), 2010 33rd International Spring Seminar on
Conference_Location :
Warsaw
Print_ISBN :
978-1-4244-7849-1
Electronic_ISBN :
978-1-4244-7850-7
DOI :
10.1109/ISSE.2010.5547246