Equipment start-up in a manufacturing environment

The authors present the methodology used to install and start up a new plasma etcher for production in a 1.0 micron/CMOS manufacturing line. It was demonstrated that a coordinated effort by equipment engineering, process engineering, technology development, equipment maintenance, and a vendor/partner can result in a quality-oriented start up. A specification was written to incorporate the procedures for installation, start up, equipment baselining, process characterization, and transfer to production on new equipment. It is noted that an ongoing relationship with a vendor/partner and all groups within the fabrication area will enable continuous improvement to the existing equipment and any new equipment being purchased