• DocumentCode
    3518014
  • Title

    Factory Automation as an Enabler in Leading-Edge Semiconductor Manufacturing

  • Author

    Pillai, Devadas

  • Author_Institution
    Intel Fellow Director, Operational Decision Support Technology, Chandler, Arizona USA
  • fYear
    2007
  • fDate
    22-25 Sept. 2007
  • Abstract
    Key innovations in factory automation systems have enabled many millions of leading-edge products to be developed and ramped at very high yields and speed in multiple factories in a very short time. These include fully automated operations which have been deployed pervasively, manufacturing, engineering and cycle-time breakthroughs, and automated process control and analysis capabilities that enable the output and quality predictability needed when manufacturing highly complex products on such a large scale. The talk will also discuss use of common platforms for rapid automation solutions deployment across the manufacturing chain, and cover the use of modeling and machine learning techniques that are used extensively to optimize development and manufacturing.
  • Keywords
    Large-scale systems; Lead compounds; Machine learning; Manufacturing automation; Manufacturing processes; Process control; Production facilities; Semiconductor device manufacture; Technological innovation; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Automation Science and Engineering, 2007. CASE 2007. IEEE International Conference on
  • Conference_Location
    Scottsdale, AZ, USA
  • Print_ISBN
    978-1-4244-1154-2
  • Electronic_ISBN
    978-1-4244-1154-2
  • Type

    conf

  • DOI
    10.1109/COASE.2007.4341657
  • Filename
    4341657