• DocumentCode
    3518113
  • Title

    Fabrication of miniaturized thick-film arms for thermoelectric microgenerators

  • Author

    Markowski, P. ; Dziedzic, A.

  • Author_Institution
    Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
  • fYear
    2010
  • fDate
    12-16 May 2010
  • Firstpage
    77
  • Lastpage
    81
  • Abstract
    In the paper fabrication process of miniaturized thick-film arms for metal-based thermoelectric microgenerator is presented. Ones arms were fabricated using special photoimaginable ink and photolithography processing. Second arms were screen-printed using standard ink, then laser shaped. In the result process of fabrication narrow paths for microgenerator was elaborated.
  • Keywords
    ink; laser beam applications; photolithography; thermoelectric conversion; thick film circuits; laser shaped arm; metal-based thermoelectric microgenerator; miniaturized thick-film arm fabrication; photoimaginable ink; photolithography processing; screen-printing; Fabrication; Ink; Laser beam cutting; Nickel; Seminars; Springs; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology (ISSE), 2010 33rd International Spring Seminar on
  • Conference_Location
    Warsaw
  • Print_ISBN
    978-1-4244-7849-1
  • Electronic_ISBN
    978-1-4244-7850-7
  • Type

    conf

  • DOI
    10.1109/ISSE.2010.5547264
  • Filename
    5547264
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3518113