Viscous damping influence on dynamic characteristics in MEMS variable capacitor

Author

Blum, Kirill E. ; Ostertak, Dmitriy I.

Author_Institution

SibIS LLC, Novosibirsk, Russia

fYear

2015

fDate

June 29 2015-July 3 2015

Firstpage

8

Lastpage

11

Abstract

Dynamic characteristics of movable electrode in MEMS variable capacitor using ANSYS software are studied. It is discovered that significant contribution to the vibration system damping is introduced by squeeze-film damping between serpentine spring arms. It is found that the vibration amplitude is inversely proportional to the stiffness coefficient and directly proportional to the number of the arms. At the same time, the amplitude is inversely proportional to damping ratio and to the arms number too. In the studied case the elastic force is strongly suppressed by the damping force.

Keywords

capacitors; damping; electrodes; micromechanical devices; springs (mechanical); ANSYS software; MEMS variable capacitor; arms number; damping force; damping ratio; elastic force; movable electrode; serpentine spring arms; squeeze-film damping; stiffness coefficient; vibration amplitude; vibration system damping; Capacitors; Damping; Force; Micromechanical devices; Q-factor; Springs; Vibrations; MEMS; quality factor; serpentine spring; vibration system; viscous damping;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on

Conference_Location

Erlagol

ISSN

2325-4173

Print_ISBN

978-1-4673-6718-9

Type

conf

DOI

10.1109/EDM.2015.7184475

Filename

7184475