DocumentCode
3518300
Title
MEMS for space applications
Author
Tang, T.K.
fYear
1999
fDate
4-7 Oct. 1999
Firstpage
67
Abstract
Summary form only given. At NASA, the focus for smaller, less costly missions has encouraged the development of microspacecraft. MEMS technology advances in terms of sensors, propulsion systems, and instruments make the notion of a specialized microspacecraft feasible in the immediate future. Emerging MEMS technology offers the integration of recent advances in micromachining and nanofabrication techniques with microelectronics in a mass-producible format, and is viewed as the next step in device and instrument miniaturization. MEMS technology has the potential to enable or enhance NASA missions in numerous ways. The technology allows component and system miniaturization, where the primary benefit is reduction in size, mass and power. MEMS technology also provides new capabilities and enhanced performance, with the greatest impact in performance, regardless of system size. Finally, with the availability of mass-produced, miniature MEMS instrumentation comes the opportunity to rethink fundamental measurement paradigms. It is now possible to expand horizons from a single instrument perspective to one involving multi-node or distributed systems. Distributed systems and missions give a new system in which functionality is enabled by a multiplicity of elements. In the future, integration of electronics, photonics, and micromechanical functionalities into "instruments-on-a-chip" will provide the ultimate size, cost, function and performance advantages. This presentation discusses recent developments and applications of MEMS technologies and devices for space applications.
Keywords
aerospace propulsion; integrated circuit packaging; micromachining; micromechanical devices; microsensors; nanotechnology; space vehicle electronics; space vehicles; MEMS; MEMS technology; NASA; NASA missions; component miniaturization; device miniaturization; distributed systems; electronic/photonic/micromechanical functionality integration; functionality; instrument miniaturization; instruments; mass reduction; mass-producible format; measurement paradigms; microelectronics; micromachining; microspacecraft; miniature MEMS instrumentation; nanofabrication techniques; power reduction; propulsion systems; sensors; size reduction; space applications; system miniaturization; system size; Availability; Instruments; Microelectronics; Micromachining; Micromechanical devices; NASA; Nanofabrication; Propulsion; Sensor systems; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 1999. Proceedings. 1999 IEEE International
Conference_Location
Rohnert Park, CA, USA
ISSN
1078-621X
Print_ISBN
0-7803-5456-7
Type
conf
DOI
10.1109/SOI.1999.819857
Filename
819857
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