Gaining competitive advantage through continuous improvement programs

The authors describe a unique use of statistical quality control (SQC) and statistical process control (SPC) techniques in a total quality management program designed to improve reliability and process capability in plasma etch systems. Although in this study an equipment manufacturing process is observed, this program paves the way for continuous improvement gains in all manufacturing cycles. The continuous improvement program is first introduced. It is then shown with reference to three case studies how definition and measurement of processes and the implementation of a six-step improvement plan have yielded positive results. Besides reduction in component failure rates, defects per unit, and machine-to-machine variation, the authors found that it was possible to make accountability a way of life, increase the warranty period for equipment, and reduce cycle time in the manufacturing area