DocumentCode
3518577
Title
Carbon film formation by Nd:YAG laser ablation
Author
Kokai, F. ; Koga, Yohei ; Niino, Hiroyuki ; Yabe, Atsushi
fYear
1995
fDate
10-14 July 1995
Firstpage
147
Keywords
Atomic beams; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Kinetic energy; Laser ablation; Mass spectroscopy; Optical pulses; Pulsed laser deposition; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527055
Filename
527055
Link To Document