DocumentCode
3518652
Title
Electrical Performances of Tellurium-Rich GexTe1-x Phase Change Memories
Author
Navarro, G. ; Pashkov, N. ; Suri, M. ; Sousa, V. ; Perniola, L. ; Maitrejean, S. ; Persico, A. ; Roule, A. ; Toffoli, A. ; De Salvo, B. ; Zuliani, P. ; Annunziata, R.
Author_Institution
CEA-LETI, MINATEC, Grenoble, France
fYear
2011
fDate
22-25 May 2011
Firstpage
1
Lastpage
4
Abstract
This paper investigates the electrical performance of Tellurium-rich GexTe1-x (with x = 0.3, 0.4, 0.5) Phase Change Memory (PCM) devices. Analysis performed on lance-type PCM cells showed an increase in threshold voltage and crystallization temperature as the Te content is increased. Furthermore, the current required to program the memory in the high resistive state decreased. The improved stability of amorphous phase in Te-rich materials gives rise to higher data retention in our devices.
Keywords
germanium compounds; phase change memories; GexTe1-x; amorphous phase; crystallization temperature; data retention; electrical performance; lance-type PCM cells; phase change memory devices; threshold voltage; Conductivity; Crystallization; Performance evaluation; Phase change materials; Resistance; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Memory Workshop (IMW), 2011 3rd IEEE International
Conference_Location
Monterey, CA
Print_ISBN
978-1-4577-0225-9
Electronic_ISBN
978-1-4577-0224-2
Type
conf
DOI
10.1109/IMW.2011.5873232
Filename
5873232
Link To Document