Design and modeling of jet dispenser based on giant magnetostrictive material

The rapid development of microelectronics packaging technology drives the development of packaging equipment manufacturing industry. As an important equipment of packaging technology, fluid dispensing system is developed rapidly. Non-contact jet dispensing is the latest technology of dispensing technology. Compared to the conventional contact dispensing methods, jet dispensing technology is a non-contact method and has the following advantages: (1) it has high flow rate, high dispensing frequency; (2) This method needn´t z-axis motion; (3) it has high dispensing accuracy and smaller wet area; (4) Needle bending and Chip surface damage situation does not arise. In this paper, we design a non-contact jet dispensing device based on giant magnetostrictive material. The giant magnetostrictive material (GMM) is a new type of function material with giant strain, high response speed, high power density and great output force. For this jet dispenser, the GMA (Giant Magnetostrictive Actuator) provides the driving force of dispensing. Because the magnetostrictive coefficient of GMM is small, we design a displacement amplifying mechanism with flexure hinges to amplify the output displacement of giant magnetostrictive actuator. The structure and principle of jet dispenser with a displacement amplifying mechanism are presented. In order to obtain the dynamic characteristics of the jet dispenser, its dynamic model and the transfer function block diagram of dispenser between excitation current and output displacement is established. The jet dispenser´s dynamic characteristics are simulated though the use of matlab. The amplitude-frequency response characteristics and dynamic characteristics is obtained. The amplifying ratio N(N = l₂/l₁) of displacement amplifying mechanism is verified, in this paper, the amplifying ratio N is 5.