DocumentCode :
3518900
Title :
Deposition of fluoropolymer thin films containing semiconductor microcrystallities by VUV laser abla
Author :
Inoue, Shingo ; Fujii, Teruya ; Kannari, Fumihiko
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
148
Keywords :
Crystallization; Laser theory; Optical films; Optical waveguides; Pulsed laser deposition; Semiconductor lasers; Semiconductor thin films; Sputtering; Substrates; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527057
Filename :
527057
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3518900
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