• DocumentCode
    3518900
  • Title

    Deposition of fluoropolymer thin films containing semiconductor microcrystallities by VUV laser abla

  • Author

    Inoue, Shingo ; Fujii, Teruya ; Kannari, Fumihiko

  • fYear
    1995
  • fDate
    10-14 July 1995
  • Firstpage
    148
  • Keywords
    Crystallization; Laser theory; Optical films; Optical waveguides; Pulsed laser deposition; Semiconductor lasers; Semiconductor thin films; Sputtering; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-2400-5
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1995.527057
  • Filename
    527057
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3518900