DocumentCode
3519220
Title
Laser wafering
Author
Bowden, Stuart ; LeBeau, James
Author_Institution
Arizona State Univ., Tempe, AZ, USA
fYear
2012
fDate
3-8 June 2012
Abstract
A new technique for the laser wafering of semiconductors is presented using sub surface laser engraving. In the laser wafering process, a high intensity laser is used to form sub-surface etch pits or defects at multiple depths in an ingot. This allows a rapid, controllable approach to the formation of wafers with thickness ranging from below 10 microns to over 100 microns. Laser wafering provides a way to cut a a brick of silicon into multiple wafers with minimal kerf loss and the possibility to dramatically lower the cost of silicon solar cell production. The techniques relies on the principle that many materials, including silicon and other semiconductors, have a non-linear absorption co-efficient with intensity, such that sub-band gap light is absorbed above a given intensity. This allows a high intensity laser to be focused at an arbitrary point below the surface, and allowing absorption of the high intensity light only at the focal point.
Keywords
absorption; laser materials processing; silicon; solar cells; Si; controllable approach; high intensity laser; laser wafering; laser wafering process; nonlinear absorption coefficient; semiconductors; silicon solar cell production cost; subband gap light; subsurface etch pits; subsurface laser engraving; wafers formation; Absorption; Glass; Semiconductor lasers; Silicon; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2012 38th IEEE
Conference_Location
Austin, TX
ISSN
0160-8371
Print_ISBN
978-1-4673-0064-3
Type
conf
DOI
10.1109/PVSC.2012.6317948
Filename
6317948
Link To Document