DocumentCode
3519325
Title
In situ measurement and micromachining of glass
Author
Wuthrich, Rolf ; Fascio, Valia ; Viquerat, Didier ; Langen, Hans
Author_Institution
Dept. de Microtech., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
fYear
1999
fDate
1999
Firstpage
185
Lastpage
191
Abstract
Glass substrates were micromachined using electro chemical discharge machining. The developed tool holder allows to scan the substrate surface as well as machining it in a closed loop. The developed control algorithm for drilling holes allows to achieve relatively high machining speeds (up to 30 μm/s) and deep structures (up to 1 mm). Micro-channels up to a depth of 100 μm were machined in one step with a removal rate of 4.5·105 μm3 /s. Reported are some examples of machining micro-holes, micro-channels and modification of existing pattering
Keywords
electrolytic machining; glass; machine tools; micromachining; micromechanical devices; 1 mm; 30 mum/s; closed loop; control algorithm; drilling; electrochemical discharge machining; glass substrates; in situ measurement; machining; micro-holes; micromachining; patterning; tool holder; Cathodes; Chemical technology; Drilling; Electrodes; Glass; Machining; Micromachining; Rough surfaces; Surface discharges; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-5790-6
Type
conf
DOI
10.1109/MHS.1999.820004
Filename
820004
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