Title :
In situ measurement and micromachining of glass
Author :
Wuthrich, Rolf ; Fascio, Valia ; Viquerat, Didier ; Langen, Hans
Author_Institution :
Dept. de Microtech., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
Glass substrates were micromachined using electro chemical discharge machining. The developed tool holder allows to scan the substrate surface as well as machining it in a closed loop. The developed control algorithm for drilling holes allows to achieve relatively high machining speeds (up to 30 μm/s) and deep structures (up to 1 mm). Micro-channels up to a depth of 100 μm were machined in one step with a removal rate of 4.5·105 μm3 /s. Reported are some examples of machining micro-holes, micro-channels and modification of existing pattering
Keywords :
electrolytic machining; glass; machine tools; micromachining; micromechanical devices; 1 mm; 30 mum/s; closed loop; control algorithm; drilling; electrochemical discharge machining; glass substrates; in situ measurement; machining; micro-holes; micromachining; patterning; tool holder; Cathodes; Chemical technology; Drilling; Electrodes; Glass; Machining; Micromachining; Rough surfaces; Surface discharges; Surface roughness;
Conference_Titel :
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5790-6
DOI :
10.1109/MHS.1999.820004
