Title :
Developing on IC flip chip bonder machine & process
Author_Institution :
Shanghai Micson Semicond. Equip. Co., Shanghai, China
Abstract :
Flip chip bonding process is a new solution for nowadays IC production. Since of small amount & much kinds of IC types, evenly to much package process, it also needs a flexible machine who can deal with many requirements in lower cost and quickly response. The MFC108 is new designed flip chip bonder for above demands. In this paper, the designing methods are also introduced. By the 3D software of mechanical designing, it spent fewer time to finish the function design with simulation that can be fount out almost all designing mistakes. On the electrical soft design, it is controlled the three kinds of parameters in the operators´ selection. The parameters are temperature, pressure and position. By the mixed process designed by users, MFC108 can finish the given bonding process. The machine bonding accuracy is plusmn5.
Keywords :
bonding processes; design engineering; flip-chip devices; integrated circuit packaging; packaging machines; 3D software; IC flip chip bonder machine; IC production; electrical soft design; flip chip bonding process; function design; machine bonding; mechanical design; package process; simulation; Bonding processes; Costs; Design methodology; Flip chip; Integrated circuit packaging; Packaging machines; Process design; Production; Software design; Temperature;
Conference_Titel :
Electronic Packaging Technology & High Density Packaging, 2009. ICEPT-HDP '09. International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-4658-2
Electronic_ISBN :
978-1-4244-4659-9
DOI :
10.1109/ICEPT.2009.5270631