• DocumentCode
    3520248
  • Title

    Sub-modeling technique for thermo-mechanical simulation of solder microbumps assembly in 3D chip stacking

  • Author

    Khong, Chee Houe ; Yu, Aibin ; Zhang, Xiaowu ; Kripesh, V. ; Pinjala, D. ; Kwong, Dim-Lee ; Chen, S. ; Chan, Chien-Feng ; Chao, Chun-Chieh ; Chiu, Chi-Hsin ; Huang, Chih-Ming ; Che, Carl

  • Author_Institution
    Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
  • fYear
    2009
  • fDate
    9-11 Dec. 2009
  • Firstpage
    591
  • Lastpage
    595
  • Abstract
    The submodeling technique is a powerful analysis tool. The method promotes more accurate analysis and also helps enhance productivity. It has been shown that by using displacement-force cut boundary condition method, it can be made even more versatile. The local stress phenomena of the solder microbump have been solved with this approach to demonstrate the concept. From the simulation model, it is known that the ENIG pad thickness has an effect on the aluminium pad stress in the silicon chip. This is important as the shear stress will damage the pad and circuitry on the chip. Previously this is not reported in other literatures as there is no strain gage available that can measure such a small dimension.
  • Keywords
    integrated circuit interconnections; integrated circuit metallisation; integrated circuit modelling; microassembling; soldering; stacking; thermal management (packaging); thermal stresses; three-dimensional integrated circuits; 3D chip stacking; ENIG pad thickness; displacement force cut boundary condition method; local stress phenomena; solder microbumps assembly; submodeling technique; thermo-mechanical simulation; Aluminum; Assembly; Boundary conditions; Circuit simulation; Productivity; Silicon; Stacking; Strain measurement; Thermal stresses; Thermomechanical processes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Packaging Technology Conference, 2009. EPTC '09. 11th
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-5099-2
  • Electronic_ISBN
    978-1-4244-5100-5
  • Type

    conf

  • DOI
    10.1109/EPTC.2009.5416481
  • Filename
    5416481