Title :
Equipment maintenance, operating costs and safety for Rochester Institute of Technology´s Integrated Circuit Laboratory
Author :
Fuller, Lynn ; Blondell, Scott ; Yackoff, Dave ; Reynolds, Clay
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
Having a cleanroom for microelectronics activities at a university is one thing. Keeping it stocked with supplies, the facility operating properly, and the equipment running is another thing. This paper describes the systems that have been established for the operation of the microelectronics facility at Rochester Institute of Technology
Keywords :
clean rooms; economics; electronic engineering education; integrated circuit manufacture; maintenance engineering; safety; IC laboratory; Rochester Institute of Technology; cleanroom; equipment maintenance; microelectronics activities; operating costs; safety; supplies; Chemical lasers; Costs; Electron beams; Integrated circuit technology; Laboratories; Lithography; Microelectronics; Safety devices; Sputter etching; Wet etching;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-3790-5
DOI :
10.1109/UGIM.1997.616680
