Dynamic analysis of structure of a piezoelectric MEMS micro-mirror actuator: Effects of chip anisotropy and residual stress

Author

Matin, A. ; Akai, D. ; Ozaki, K. ; Kawazu, N. ; Hanebuchi, M. ; Sawada, K. ; Ishida, M.

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2009

fDate

9-11 Dec. 2009

Firstpage

416

Lastpage

421

Abstract

This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both eigenfrequencies and eigenmodes. Eigenmodes were found to be significantly changed and shifted with such a stress state. Dynamic harmonic analysis exhibited a significant maximum vertical deflection of ~28 Â¿m attainable with the actuator when excited at a resonant frequency of 112,600 Hz under 2D scanning mode.

Keywords

eigenvalues and eigenfunctions; finite element analysis; internal stresses; magnetic anisotropy; microactuators; micromirrors; piezoelectric actuators; silicon; anisotropic property; chip anisotropy; dynamic behavior; dynamic harmonic analysis; eigenfrequency; eigenmode; finite element simulation; piezoelectric MEMS micromirror actuator; residual stress; silicon chip; stress state; Anisotropic magnetoresistance; Capacitive sensors; Conducting materials; Dielectric materials; Dielectric thin films; Electrodes; Ferroelectric materials; Micromechanical devices; Piezoelectric actuators; Residual stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Packaging Technology Conference, 2009. EPTC '09. 11th

Conference_Location

Singapore

Print_ISBN

978-1-4244-5099-2

Electronic_ISBN

978-1-4244-5100-5

Type

conf

DOI

10.1109/EPTC.2009.5416510

Filename

5416510