• DocumentCode
    3520820
  • Title

    Lot Dispatching and Scheduling Integrating OHT Traffic Information in the 300mm Wafer Fab

  • Author

    Huang, How-Wei ; Lu, Ching-Hu ; Fu, Li-Chen

  • Author_Institution
    Nat. Taiwan Univ., Taipei
  • fYear
    2007
  • fDate
    22-25 Sept. 2007
  • Firstpage
    495
  • Lastpage
    500
  • Abstract
    In this paper, we focus on the lot dispatching and vehicle dispatching problems in a 300 mm wafer fab. We propose a two phase lot dispatching and vehicle dispatching integrated algorithm. The first phase is the offline optimization phase and the second phase is the online dispatching phase. In the offline optimization phase, we focus on the lot dispatching problem. We propose a scheduler which can search for appropriate weights of several rules and combines them into one mixed rule. Genetic algorithm (GA) is used to find the optimal combination of these heuristic rules. And the mixed rule is used in online dispatching phase. In the online dispatching phase, we focus on the vehicle dispatching problem. We take the real time traffic information into consideration and we apply Markov decision model to model the estimate of the cost of traversing a congested edge. Compared with the traditional shortest path method that searches for the shortest distance path, in our traffic model we search for the path with least expected travel time.
  • Keywords
    Markov processes; dispatching; genetic algorithms; hoists; lot sizing; scheduling; semiconductor device manufacture; transportation; Markov decision model; OHT traffic information; genetic algorithms; lot dispatching; offline optimization phase; online dispatching phase; overhead hoist transportation; scheduling; semiconductor fabrication; vehicle dispatching problem; wafer fab; Automotive engineering; Dispatching; Fabrication; Genetic algorithms; Manufacturing automation; Semiconductor device manufacture; Semiconductor device modeling; Traffic control; Vehicle dynamics; Workstations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Automation Science and Engineering, 2007. CASE 2007. IEEE International Conference on
  • Conference_Location
    Scottsdale, AZ
  • Print_ISBN
    978-1-4244-1154-2
  • Electronic_ISBN
    978-1-4244-1154-2
  • Type

    conf

  • DOI
    10.1109/COASE.2007.4341833
  • Filename
    4341833