DocumentCode
3520820
Title
Lot Dispatching and Scheduling Integrating OHT Traffic Information in the 300mm Wafer Fab
Author
Huang, How-Wei ; Lu, Ching-Hu ; Fu, Li-Chen
Author_Institution
Nat. Taiwan Univ., Taipei
fYear
2007
fDate
22-25 Sept. 2007
Firstpage
495
Lastpage
500
Abstract
In this paper, we focus on the lot dispatching and vehicle dispatching problems in a 300 mm wafer fab. We propose a two phase lot dispatching and vehicle dispatching integrated algorithm. The first phase is the offline optimization phase and the second phase is the online dispatching phase. In the offline optimization phase, we focus on the lot dispatching problem. We propose a scheduler which can search for appropriate weights of several rules and combines them into one mixed rule. Genetic algorithm (GA) is used to find the optimal combination of these heuristic rules. And the mixed rule is used in online dispatching phase. In the online dispatching phase, we focus on the vehicle dispatching problem. We take the real time traffic information into consideration and we apply Markov decision model to model the estimate of the cost of traversing a congested edge. Compared with the traditional shortest path method that searches for the shortest distance path, in our traffic model we search for the path with least expected travel time.
Keywords
Markov processes; dispatching; genetic algorithms; hoists; lot sizing; scheduling; semiconductor device manufacture; transportation; Markov decision model; OHT traffic information; genetic algorithms; lot dispatching; offline optimization phase; online dispatching phase; overhead hoist transportation; scheduling; semiconductor fabrication; vehicle dispatching problem; wafer fab; Automotive engineering; Dispatching; Fabrication; Genetic algorithms; Manufacturing automation; Semiconductor device manufacture; Semiconductor device modeling; Traffic control; Vehicle dynamics; Workstations;
fLanguage
English
Publisher
ieee
Conference_Titel
Automation Science and Engineering, 2007. CASE 2007. IEEE International Conference on
Conference_Location
Scottsdale, AZ
Print_ISBN
978-1-4244-1154-2
Electronic_ISBN
978-1-4244-1154-2
Type
conf
DOI
10.1109/COASE.2007.4341833
Filename
4341833
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