Integration of a MEMS education curriculum with interdisciplinary research

Author

Liu, Chang

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

fYear

1997

fDate

20-23 Jul 1997

Firstpage

137

Lastpage

140

Abstract

Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under development at the University of Illinois. The plan contains three steps-introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects

Keywords

electronic engineering education; micromechanical devices; MEMS; University of Illinois; interdisciplinary research; undergraduate education curriculum; Biology; Chemical technology; Computer science education; Integrated circuit technology; Microelectromechanical devices; Micromachining; Micromechanical devices; Optical device fabrication; Systems engineering education; Textile industry;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Conference_Location

Rochester, NY

ISSN

0749-6877

Print_ISBN

0-7803-3790-5

Type

conf

DOI

10.1109/UGIM.1997.616707

Filename

616707