Fabrication and hydrogen sensing properties of Titania nanotubes

Author

Bai, Shuo ; Ding, Dongyan ; Ning, Congqin ; Qin, Rui ; Li, Yan ; Chang, Chengkang ; Li, Ming ; Mao, Dali

Author_Institution

Lab. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China

fYear

2009

fDate

10-13 Aug. 2009

Firstpage

530

Lastpage

533

Abstract

TiO₂ nanotubes have wide applications in gas sensing applications such as oxygen sensors and hydrogen sensors. In this work, crystallized TiO₂ nanotubes self-assembled on Ti substrate were fabricated through anodization and heat-treatment. The anodization parameters for fabricating optimized nanostructures were investigated and hydrogen sensing properties of the nanotubes were tested. It was found that the anodization temperature and voltage had a great impact on the formation of uniform nanotubes or nanostructures. And the nanotubes assembled on Cu-coated PCB demonstrated a good hydrogen sensing properties at room temperature.

Keywords

anodisation; copper; gas sensors; heat treatment; hydrogen; nanofabrication; nanosensors; nanotube devices; self-assembly; titanium compounds; H₂; TiO₂; anodization parameters; copper-coated PCB; gas sensing application; heat treatment; hydrogen sensing properties; nanostructure fabrication; nanostructure formation; nanotube self-assembly; temperature 293 K to 298 K; titania nanotube fabrication; uniform nanotube formation; Crystallization; Fabrication; Gas detectors; Hydrogen; Nanostructures; Nanotubes; Self-assembly; Temperature sensors; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Packaging Technology & High Density Packaging, 2009. ICEPT-HDP '09. International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-4658-2

Electronic_ISBN

978-1-4244-4659-9

Type

conf

DOI

10.1109/ICEPT.2009.5270693

Filename

5270693