DocumentCode
3521354
Title
Secondary generated holes as a crucial component for modeling of HC degradation in high-voltage n-MOSFET
Author
Tyaginov, Stanislav ; Starkov, Ivan ; Triebl, Oliver ; Ceric, Hajdin ; Grasser, Tibor ; Enichlmair, Hubert ; Park, Jong-Mun ; Jungemann, Christoph
Author_Institution
Inst. for Microelectron., Tech. Univ. Wien, Vienna, Austria
fYear
2011
fDate
8-10 Sept. 2011
Firstpage
123
Lastpage
126
Abstract
We propose a physics-based model for hot-carrier degradation (HCD), which is able to represent HCD observed in n-channel high-voltage MOSFETs with different channel length with a single set of physical parameters. Our approach considers not only damage produced by channel electrons but also by secondary generated channel holes. Although the contribution of the holes to the total defect creation is smaller compared to that of electrons, their impact on the linear drain current is comparable with the electronic one. The reason behind this trend is that hole-induced traps are shifted towards the source, thereby more severely affecting the device behavior.
Keywords
MOSFET; Monte Carlo methods; hot carriers; HC degradation; channel electron; high-voltage n-MOSFET; hole-induced trap; hot-carrier degradation; linear drain current; physics-based model; secondary generated hole; Acceleration; Degradation; Electron traps; Hot carriers; Interface states; Reliability; Monte-Carlo; TCAD; hot-carrier degradation; interface states;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation of Semiconductor Processes and Devices (SISPAD), 2011 International Conference on
Conference_Location
Osaka
ISSN
1946-1569
Print_ISBN
978-1-61284-419-0
Type
conf
DOI
10.1109/SISPAD.2011.6035065
Filename
6035065
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