DocumentCode :
3521525
Title :
Micro-optic diffractive components fabricated by electron-beam lithography
Author :
Shiono, T.
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
157
Keywords :
High speed optical techniques; Integrated optics; Lenses; Lithography; Microoptics; Optical diffraction; Optical reflection; Optical sensors; Optical waveguides; Writing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527071
Filename :
527071
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3521525
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