DocumentCode
3521752
Title
Efficient and practical experimental designs for high volume manufacturing
Author
Brunelle, Raymond
Author_Institution
Nat. Semicond. Corp., South Portland, ME, USA
fYear
1991
fDate
20-22 May 1991
Firstpage
139
Lastpage
144
Abstract
An experimental design technique that permits process optimization studies to extend beyond process average response curves and that optimizes with respect to primary (main) variables and secondary (tolerated) variables is described. The method modifies W.J. Diamond´s (1981) approach for the inner array and modifies G. Taguchi´s (1986) approach for a high-volume manufacturing environment and is experimentally efficient. It is capable of estimating average effects of primary and secondary variables, effects of primary variable process variances, and the process average/variance interrelationship. In using advanced experimental design techniques, three major goals have been achieved; (1) increased manufacturability, (2) improved quality, as shown by a reduction in outgoing DPPM levels, and (3) streamlined assembly processes and decreased cycle time
Keywords
integrated circuit manufacture; process control; quality control; National Semiconductor; decreased cycle time; experimental design technique; experimental design techniques; experimentally efficient; high-volume manufacturing environment; improved quality; increased manufacturability; inner array; major goals; practical experimental designs; primary variable process variances; process average/variance interrelationship; process optimization studies; secondary variables; streamlined assembly processes; Assembly; Design engineering; Design for experiments; Design optimization; Engineering management; Integrated circuit manufacture; Manufacturing processes; Response surface methodology; Semiconductor device manufacture; US Department of Energy;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Science Symposium, 1991. ISMSS 1991., IEEE/SEMI International
Conference_Location
Burlingame, CA
Print_ISBN
0-7803-0027-0
Type
conf
DOI
10.1109/ISMSS.1991.146283
Filename
146283
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