Title :
Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing
Author :
Dickson, Jeffrey A. ; Goodman, Rodney M.
Author_Institution :
Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
Abstract :
We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless nickel and gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors
Keywords :
CMOS integrated circuits; chemical sensors; conducting polymers; polymer films; sensor fusion; CMOS process; carbon black based polymer; chemical sensors; diverse sensors; electroless plating; individually addressable sensing nodes; integrated sensor; post-processing; Biosensors; CMOS process; Chemical and biological sensors; Chemical sensors; Chemical technology; Circuits; Polymer films; Sensor arrays; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Circuits and Systems, 2000. Proceedings. ISCAS 2000 Geneva. The 2000 IEEE International Symposium on
Conference_Location :
Geneva
Print_ISBN :
0-7803-5482-6
DOI :
10.1109/ISCAS.2000.858758
