Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing

Author

Dickson, Jeffrey A. ; Goodman, Rodney M.

Author_Institution

Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA

Volume

4

fYear

2000

fDate

2000

Firstpage

341

Abstract

We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless nickel and gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors

Keywords

CMOS integrated circuits; chemical sensors; conducting polymers; polymer films; sensor fusion; CMOS process; carbon black based polymer; chemical sensors; diverse sensors; electroless plating; individually addressable sensing nodes; integrated sensor; post-processing; Biosensors; CMOS process; Chemical and biological sensors; Chemical sensors; Chemical technology; Circuits; Polymer films; Sensor arrays; Sensor phenomena and characterization; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2000. Proceedings. ISCAS 2000 Geneva. The 2000 IEEE International Symposium on

Conference_Location

Geneva

Print_ISBN

0-7803-5482-6

Type

conf

DOI

10.1109/ISCAS.2000.858758

Filename

858758