Title :
IEEE/SEMI International Semiconductor Manufacturing Science Symposium (Cat. No.91CH2993-4)
Abstract :
The following topics are dealt with: manufacturing management; equipment performance and reliability; CIM (computer-integrated manufacturing)/manufacturing standards; and process control/SPC (statistical process control)
Keywords :
CAD/CAM; integrated circuit manufacture; management; manufacturing computer control; manufacturing data processing; process control; semiconductor device manufacture; standards; statistical process control; CIM; computer-integrated manufacturing; equipment performance; manufacturing management; manufacturing standards; process control; reliability; semiconductor manufacturing science; statistical process control;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1991. ISMSS 1991., IEEE/SEMI International
Conference_Location :
Burlingame, CA, USA
Print_ISBN :
0-7803-0027-0
DOI :
10.1109/ISMSS.1991.146290
