A linear stepping piezoelectric motor using inertial impact driving

Linear piezoelectric motors adopting inertial impact driving mechanism has been driving the interests of many researchers for simple structure and compact size. To increase the efficiency of this type of stepping linear motor, a motor using two piezoelectric stacks was proposed in this work. Two piezoelectric stacks were placed in parallel and were preloaded between a triangular displacement transformer and a spring structure. Support for the stator was designed. Operation principle of this motor was analyzed and the improvements comparing with present designs were discussed. To validate this operation principle, a prototype was fabricated and testing on this prototype was conduct too. By applying saw wave voltage signal to piezoelectric stacked in this prototype, the stator of the motor is able to push its mover move with pace length of 0.1 micrometer.