Title :
A rapid-response saw-based sensor for H2S detection
Author :
Li, Honglang ; Wang, Xiudong ; Liang, Yong ; He, Shitang
Author_Institution :
Inst. of Acoust., Beijing, China
Abstract :
This paper developed a method to improve the response velocity of Surface acoustic wave (SAW)-based H2S sensor employing SnO2 film. Due to a SAW-based detector is endowed with inherent high sensitivity, it is adopted to detect low-level inorganic gas. However, this detector´s speed of response and recovery is very low when it is operating in room temperature. Our work is motivated by the observation that the sensor inertia can be accelerated by changing working temperature and constructing digital sensor model. Firstly, A set of evaluation experiments are established. SnO2/CuO composite film and 36°YX-LiTaO3 are adopted as waveguide layer and substrate of love wave sensor respectively. Secondly, a sensor´s response speed is measured when it works at specified 160°C. Experimental result shows good repeatability for sensing H2S. The response in 160°C shows more than 100 times of that in home temperature. Lastly, a simple sensor model is constructed to determine concentration value in a relative short time. The fitting results show that the whole response procedure can be predicated in shorter time for six times. The evaluation model is demonstrated as a promising method to accelerate the response velocity for SAW-based H2S sensor.
Keywords :
Love waves; composite materials; copper compounds; gas sensors; hydrogen compounds; intelligent sensors; surface acoustic wave sensors; thin film sensors; tin compounds; H2S; LiTaO3; SAW-based detector; SnO2-CuO; composite film; concentration value; digital sensor model; home temperature; low level inorganic gas; rapid-response SAW-based H2S sensor; response velocity; sensor response speed; simple sensor model; surface acoustic wave-based H2S sensor; temperature 160 degC; temperature 293 K to 298 K; waveguide layer; Acceleration; Detectors; Films; Surface acoustic waves; Temperature measurement; Temperature sensors; H2S Sensor; Rapid response; SnO2; Surface acoustic wave;
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011 Symposium on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4673-1075-8
DOI :
10.1109/SPAWDA.2011.6167267