DocumentCode
3524952
Title
Fast and simple via opening technology in teflon and polyimide by combining laser irradiation and ul
Author
Haba, B.
fYear
1995
fDate
10-14 July 1995
Firstpage
186
Keywords
Chemical lasers; Chemical technology; Cleaning; Drilling; Laser ablation; Laser stability; Optical materials; Optical pulses; Polyimides; Pulsed laser deposition;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527116
Filename
527116
Link To Document