• DocumentCode
    3524952
  • Title

    Fast and simple via opening technology in teflon and polyimide by combining laser irradiation and ul

  • Author

    Haba, B.

  • fYear
    1995
  • fDate
    10-14 July 1995
  • Firstpage
    186
  • Keywords
    Chemical lasers; Chemical technology; Cleaning; Drilling; Laser ablation; Laser stability; Optical materials; Optical pulses; Polyimides; Pulsed laser deposition;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-2400-5
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1995.527116
  • Filename
    527116