• DocumentCode
    3525024
  • Title

    Development of mask-pattern proiection optical system for excimer laser ablation

  • Author

    Minagawa, Tomonori ; Izumo, M. ; Matsushita, Yuki ; Sugitatsu, A. ; Zumoto, N. ; Yagi, Yasushi

  • fYear
    1995
  • fDate
    10-14 July 1995
  • Firstpage
    188
  • Keywords
    Distributed Bragg reflectors; Laser ablation; Laser mode locking; Lenses; Optical distortion; Optical imaging; Optical materials; Optical modulation; Optical variables control; Reflectivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-2400-5
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1995.527120
  • Filename
    527120
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3525024