• DocumentCode
    3525965
  • Title

    Thermal field processes in liquid metal ion sources

  • Author

    Ptitsin, V.E.

  • Author_Institution
    Inst. for Anal. Instrum., Russian Acad. of Sci., St. Petersburg, Russia
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    111
  • Lastpage
    112
  • Abstract
    The emission of excited neutrals and positive ions from the liquid metal surface in electric fields depends on thermal field processes. Such processes include interaction between the liquid metal surface and electron flux of high power density exceeding a threshold value P*, evaporation of neutrals activated by metal electron subsystem excitation, and lastly, field ionization of evaporating neutrals. All these processes are interrelated and cyclic in nature.
  • Keywords
    electric fields; excited states; field ionisation; liquid metal ion sources; positive ions; electric fields; electron flux interaction; excited neutral emission; field ionization; liquid metal ion sources; liquid metal surface; liquid metal surface interaction; metal electron subsystem excitation; neutral evaporation; positive ion emission; thermal field processes; Atomic layer deposition; Current density; Electron emission; Ion emission; Ion sources; Ionization; Iron; Surface treatment; Temperature; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271565
  • Filename
    5271565