Title :
Optoelectronic CMOS-SEED smart pixels
Author :
Chen, HongDa ; Zeng, Qingming ; Li, Xizihjie ; Chen, Zhibiao ; Du, Yun ; Zhang, Yi ; Liang, Kun ; Wu, Ronghan
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Abstract :
We have made optoelectronic smart pixels using a hybrid integration of GaAs/AlGaAs multiple quantum well (MQW) self- electro-optic effect device (SEED) arrays flip-chip bonded directly on the top of a 1 /spl mu/m silicon CMOS circuits. This enables optoelectronic integrated circuits (OEIC) to be achieved and also the design and optimization of the CMOS circuits and the GaAs/AlGaAs multiple quantum well devices to proceed independently.
Keywords :
CMOS integrated circuits; III-V semiconductors; SEEDs; aluminium compounds; flip-chip devices; gallium arsenide; integrated optoelectronics; quantum well devices; semiconductor quantum wells; smart pixels; CMOS-SEED smart pixels; GaAs-AlGaAs; GaAs/AlGaAs multiple quantum well devices; MQW; OEIC; Si; Si CMOS circuits; flip-chip bonding; hybrid integration; optoelectronic integrated circuits; optoelectronic smart pixels; self electro-optic effect device arrays; Circuits; Electrooptic devices; Gallium arsenide; High speed optical techniques; Optical arrays; Optical modulation; Optoelectronic devices; Quantum well devices; Silicon; Smart pixels;
Conference_Titel :
Communications, 1999. APCC/OECC '99. Fifth Asia-Pacific Conference on ... and Fourth Optoelectronics and Communications Conference
Conference_Location :
Beijing, China
Print_ISBN :
7-5635-0402-8
DOI :
10.1109/APCC.1999.820586
