Title :
Scanning probe microscopy for testing ultrafast electronics
Author :
Hou, A.S. ; Nechay, B.A. ; Ho, F. ; Bloom, D.M.
Keywords :
Atomic force microscopy; Diffraction gratings; Electronic equipment testing; Frequency modulation; Laser beams; Optical microscopy; Resonant frequency; Scanning probe microscopy; Ultrafast electronics; Voltage control;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527160