Development of soft magnetic thin films for GHz applications

Author

Shim, J. ; Kim, I. ; Kim, J. ; Han, S.H. ; Kim, H.J. ; Ki Hyeon Kim ; Yamaguchi, Masahiro

Author_Institution

Dept. of Mater. Eng. Sci., Hanyang Univ., Ansan, South Korea

fYear

2005

fDate

4-8 April 2005

Firstpage

39

Lastpage

40

Abstract

We recently fabricated as-deposited Fe-Co-Ni-B soft magnetic thin films by RF magnetron sputtering which have 4πM_s of 21.5 kG, coercivity (H_c) of 0.9 Oe, and the linear effective permeability of about 600 up to 1 GHz. Furthermore, a more effective method for increasing H_k, i.e. an oblique deposition method, was suggested. Therefore, we have investigated the effects of the new, method on high frequency characteristics of Fe-Co-Ni-B soft magnetic thin films by the analysis of magnetic properties and microstructures. The soft magnetic properties and high frequency characteristics of single layer FeCoNiB thin films can be controlled by the oblique deposition method.

Keywords

boron alloys; cobalt alloys; coercive force; crystal microstructure; ferromagnetic materials; iron alloys; magnetic permeability; magnetic thin films; metallic thin films; nickel alloys; soft magnetic materials; sputter deposition; 1 GHz; 21.5 kG; FeCoNiB; coercivity; high frequency characteristics; linear effective permeability; magnetic properties; microstructures; oblique deposition method; soft magnetic thin films; Frequency; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic properties; Magnetic resonance; Permeability; Saturation magnetization; Soft magnetic materials; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1463448

Filename

1463448