• DocumentCode
    3526929
  • Title

    Fabrication and electron field emission properties of titanium-oxide nanowire

  • Author

    Wakaya, F. ; Miki, M. ; Fukuyama, C. ; Murakami, K. ; Abo, S. ; Takai, M.

  • Author_Institution
    Center for Quantum Sci. & Technol., Osaka Univ., Toyonaka, Japan
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    145
  • Lastpage
    146
  • Abstract
    In this paper, fabrication process of titanium-oxide nanowires, whose diameter and length were in the order of 10 nm and 1 mum, respectively, were successfully fabricated directly on a glass substrate and it´s field-emission properties are discussed, in spite of the poor adhesion. This is profitable in realizing large-diagonal FED´s and BLU´s because glass is less expensive than a Si wafer and a titanium ingot. Scanning-electron-microscope (SEM) observation revealed that there were one-dimensional structures on the surface of the titanium thin film, whose diameter and length were in the order of 10 nm and 1 mum, respectively. Energy dispersive X-ray spectroscopy showed the existence of titanium and oxygen and did not show any silicon signals from the glass substrate, which means successful synthesis of titanium-oxide nanowires in such a simple and low-temperature process.
  • Keywords
    X-ray chemical analysis; adhesion; electron field emission; nanofabrication; nanowires; scanning electron microscopy; thin films; titanium compounds; SEM; TiO2; electron field emission properties; energy dispersive X-ray spectroscopy; glass substrate; low-temperature process; one-dimensional structures; poor adhesion; scanning-electron-microscopy; size 1 mum; size 10 nm; titanium thin film; titanium-oxide nanowire fabrication; Adhesives; Dispersion; Electron emission; Fabrication; Glass; Silicon; Spectroscopy; Substrates; Titanium; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271617
  • Filename
    5271617