DocumentCode
3526929
Title
Fabrication and electron field emission properties of titanium-oxide nanowire
Author
Wakaya, F. ; Miki, M. ; Fukuyama, C. ; Murakami, K. ; Abo, S. ; Takai, M.
Author_Institution
Center for Quantum Sci. & Technol., Osaka Univ., Toyonaka, Japan
fYear
2009
fDate
20-24 July 2009
Firstpage
145
Lastpage
146
Abstract
In this paper, fabrication process of titanium-oxide nanowires, whose diameter and length were in the order of 10 nm and 1 mum, respectively, were successfully fabricated directly on a glass substrate and it´s field-emission properties are discussed, in spite of the poor adhesion. This is profitable in realizing large-diagonal FED´s and BLU´s because glass is less expensive than a Si wafer and a titanium ingot. Scanning-electron-microscope (SEM) observation revealed that there were one-dimensional structures on the surface of the titanium thin film, whose diameter and length were in the order of 10 nm and 1 mum, respectively. Energy dispersive X-ray spectroscopy showed the existence of titanium and oxygen and did not show any silicon signals from the glass substrate, which means successful synthesis of titanium-oxide nanowires in such a simple and low-temperature process.
Keywords
X-ray chemical analysis; adhesion; electron field emission; nanofabrication; nanowires; scanning electron microscopy; thin films; titanium compounds; SEM; TiO2; electron field emission properties; energy dispersive X-ray spectroscopy; glass substrate; low-temperature process; one-dimensional structures; poor adhesion; scanning-electron-microscopy; size 1 mum; size 10 nm; titanium thin film; titanium-oxide nanowire fabrication; Adhesives; Dispersion; Electron emission; Fabrication; Glass; Silicon; Spectroscopy; Substrates; Titanium; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location
Shizuoka
Print_ISBN
978-1-4244-3587-6
Electronic_ISBN
978-1-4244-3588-3
Type
conf
DOI
10.1109/IVNC.2009.5271617
Filename
5271617
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