• DocumentCode
    3527389
  • Title

    Direct growth method of carbon nanotubes onto a tungsten tip for field emitter fabrication

  • Author

    Sato, Hideki ; Ikesugi, Koichi ; Kanayama, Hisanori ; Kajiwara, Kazuo ; Hata, Kochi

  • Author_Institution
    Grad. Sch. of Eng., Mie Univ., Tsu, Japan
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    253
  • Lastpage
    254
  • Abstract
    The author developed a method to grow CNTs selectively onto an apex of W-tip using "selective etching" method. Here the author reports that this method is also valid to control the number of CNTs at the W-tip.
  • Keywords
    carbon nanotubes; etching; field emission; semiconductor growth; W-tip; carbon nanotubes; direct growth method; field emitter fabrication; selective etching; tungsten tip; Carbon nanotubes; Chemical vapor deposition; Electrokinetics; Etching; Fabrication; Inductors; Iron; Nonhomogeneous media; Scanning electron microscopy; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271643
  • Filename
    5271643