DocumentCode
3527389
Title
Direct growth method of carbon nanotubes onto a tungsten tip for field emitter fabrication
Author
Sato, Hideki ; Ikesugi, Koichi ; Kanayama, Hisanori ; Kajiwara, Kazuo ; Hata, Kochi
Author_Institution
Grad. Sch. of Eng., Mie Univ., Tsu, Japan
fYear
2009
fDate
20-24 July 2009
Firstpage
253
Lastpage
254
Abstract
The author developed a method to grow CNTs selectively onto an apex of W-tip using "selective etching" method. Here the author reports that this method is also valid to control the number of CNTs at the W-tip.
Keywords
carbon nanotubes; etching; field emission; semiconductor growth; W-tip; carbon nanotubes; direct growth method; field emitter fabrication; selective etching; tungsten tip; Carbon nanotubes; Chemical vapor deposition; Electrokinetics; Etching; Fabrication; Inductors; Iron; Nonhomogeneous media; Scanning electron microscopy; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location
Shizuoka
Print_ISBN
978-1-4244-3587-6
Electronic_ISBN
978-1-4244-3588-3
Type
conf
DOI
10.1109/IVNC.2009.5271643
Filename
5271643
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