A simple process of growing vertically aligned carbon nanotube emitter on metal foil for X-ray source

Author

Ryu, Je Hwang ; Lim, Han Eol ; Son, Byoung Taek ; Bae, Na Young ; Oh, Hye Mi ; Jeong, Il Ok ; Kim, Jong Uk ; Nakamoto, Masayuki ; Jang, Jin ; Park, Kyu Chang

Author_Institution

Dept. of Inf. Display, KyungHee Univ., Seoul, South Korea

fYear

2009

fDate

20-24 July 2009

Firstpage

239

Lastpage

240

Abstract

In this study, a simple process has been proposed for vertically aligned CNT growth on metal foil and then the applied CNT emitter as electron source for X-ray generation.The CNTs were grown using a triode dc-PECVD (plasma enhanced chemical vapor deposition). The growth temperature was maintained at 700 degC. To confirm the electron emission of the vertically aligned CNTs on metal foil, emission current was measured using diode structure. A CNT-based X-ray tube which can generate sufficient X-ray flux for diagnostic imaging applications was also demonstrated.

Keywords

X-ray tubes; carbon nanotubes; field emitter arrays; nanotube devices; plasma CVD; triodes; C; CNT; X-ray source; X-ray tube; carbon nanotube emitter; electron emission; plasma enhanced chemical vapor deposition; temperature 700 degC; triode dc-PECVD; Carbon nanotubes; Electron sources; Plasma applications; Plasma chemistry; Plasma diagnostics; Plasma measurements; Plasma sources; Plasma temperature; Plasma x-ray sources; X-ray imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International

Conference_Location

Shizuoka

Print_ISBN

978-1-4244-3587-6

Electronic_ISBN

978-1-4244-3588-3

Type

conf

DOI

10.1109/IVNC.2009.5271660

Filename

5271660