• DocumentCode
    3528031
  • Title

    Field emitter array with a built-in multi-electrode lens

  • Author

    Nagao, M. ; Yoshida, T. ; Kanemaru, S. ; Neo, Y. ; Mimura, H.

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    39
  • Lastpage
    40
  • Abstract
    This paper reports the successful fabrication of a field emitter array with a built-in multi-electrode lens, such as a quad-gate and a penta-gate FEA. The fabrication is based on an etch-back technique.
  • Keywords
    electrodes; etching; field emitter arrays; lenses; built-in multielectrode lens; etch-back technique; field emitter array fabrication; pentagate FEA; quadgate FEA; Anodes; Electrodes; Etching; Fabrication; Field emitter arrays; Focusing; Insulation; Lenses; Resists; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271678
  • Filename
    5271678
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3528031