DocumentCode
3528106
Title
Scanning hall probe microscopy (SHPM) using quartz crystal AFM feedback
Author
Dede, M. ; Urkmen, K. ; Oral, Ahmet
Author_Institution
Dept. of Phys., Bilkent Univ., Ankara, Turkey
fYear
2005
fDate
4-8 April 2005
Firstpage
199
Lastpage
200
Abstract
In the scanning Hall probe microscopy (SHPM) technique, scanning tunneling microscope (STM) or atomic force microscope (AFM) feedback is usually used for bringing the Hall sensor into close proximity of a sample. Here, we used quartz crystal AFM feedback in microfabrication of Hall sensors and in the operation of SHPM. This method eliminates the necessity of conducting samples in SHPM.
Keywords
Hall effect devices; atomic force microscopy; force sensors; nanotechnology; piezoelectric materials; quartz; scanning tunnelling microscopy; Hall sensor; Scanning Hall Probe Microscopy; Scanning Tunneling Microscope; SiO2; conducting samples; microfabrication; quartz crystal AFM feedback; Atomic force microscopy; Feedback; Force sensors; Gold; Gratings; Hall effect devices; Magnetic fields; Magnetic sensors; Surface topography; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN
0-7803-9009-1
Type
conf
DOI
10.1109/INTMAG.2005.1463528
Filename
1463528
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