DocumentCode
3528156
Title
Detecting defects of vacuum nanoelectron devices and IC based on penetrate insulating layer non-destructive endoscopy method in SEM
Author
Hu, Wenguo ; Chen, Mingguang ; Fei, Xinliang ; Xiao, Lin ; Liang, Zhuguang ; Rau, E.I. ; Zhou, Kailin ; Wang, Jian ; Lan, Dechun ; Li, Ping
Author_Institution
Sch. of Phys. Sci. & Technol., Yunnan Univ., Kunming, China
fYear
2009
fDate
20-24 July 2009
Firstpage
313
Lastpage
314
Abstract
This paper is introduced untouchedly and nondestructively new testing method and instrument, this new method called ldquoelectron beam nondestructively microscopically penetrate insulating layer endoscopy VNED, IC and semiconductor detecting method and instrumentrdquo.
Keywords
endoscopes; integrated circuits; nanoelectronics; nondestructive testing; scanning electron microscopy; sensors; vacuum apparatus; IC; SEM; VNED; defects; electron beam; nondestructive endoscopy method; penetrate insulating layer; semiconductor detecting method; vacuum nanoelectron devices; Electron beams; Endoscopes; Instruments; Insulation; Integrated circuit testing; Microstructure; Nanoscale devices; Nondestructive testing; Scanning electron microscopy; Semiconductor device testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location
Shizuoka
Print_ISBN
978-1-4244-3587-6
Electronic_ISBN
978-1-4244-3588-3
Type
conf
DOI
10.1109/IVNC.2009.5271686
Filename
5271686
Link To Document