Title :
Dynamic electrical characterization of CMOS-like thin film transistor circuits
Author :
Gautier, G. ; Crand, S. ; Bonnaud, O.
Author_Institution :
Center Commun de Microelectron. de l´´Ouest, Inst. d´´Electron. et de Telecommun. de Rennes., Rennes, France
Abstract :
This tutorial is intended to graduate students, specialized in microelectronics formation. Before this work, the concerned students have spent one week in the cleanroom. In this training, with the help of teachers of the common microelectronics center, they processed and characterized a specific thin film transistor technology. The main goal was to set-up a bench that allows measuring dynamic parameters such as rise time, fall time and oscillator frequency directly on glass substrate and to analyze and explain the results on the base of classical modeling available for VLSI CMOS circuits.
Keywords :
CMOS integrated circuits; VLSI; characteristics measurement; clean rooms; educational courses; electronic engineering education; frequency measurement; glass; oscillators; semiconductor device measurement; substrates; thin film circuits; thin film transistors; training; CMOS like thin film transistor circuits; VLSI CMOS circuits; clean room; complementary metal-oxide semiconductor; dynamic electrical characterization; dynamic parameters measurement; fall time measurement; glass substrate; microelectronics center; oscillator frequency measurement; rise time measurement; thin film transistor circuits electrical characteristics; thin film transistor technology; training; very large scale integration; CMOS technology; Circuits; Frequency measurement; Glass; Microelectronics; Oscillators; Semiconductor device modeling; Substrates; Thin film transistors; Time measurement;
Conference_Titel :
Microelectronic Systems Education, 2003. Proceedings. 2003 IEEE International Conference on
Print_ISBN :
0-7695-1973-3
DOI :
10.1109/MSE.2003.1205233