DocumentCode
3529445
Title
Dynamic electrical characterization of CMOS-like thin film transistor circuits
Author
Gautier, G. ; Crand, S. ; Bonnaud, O.
Author_Institution
Center Commun de Microelectron. de l´´Ouest, Inst. d´´Electron. et de Telecommun. de Rennes., Rennes, France
fYear
2003
fDate
1-2 June 2003
Firstpage
14
Lastpage
15
Abstract
This tutorial is intended to graduate students, specialized in microelectronics formation. Before this work, the concerned students have spent one week in the cleanroom. In this training, with the help of teachers of the common microelectronics center, they processed and characterized a specific thin film transistor technology. The main goal was to set-up a bench that allows measuring dynamic parameters such as rise time, fall time and oscillator frequency directly on glass substrate and to analyze and explain the results on the base of classical modeling available for VLSI CMOS circuits.
Keywords
CMOS integrated circuits; VLSI; characteristics measurement; clean rooms; educational courses; electronic engineering education; frequency measurement; glass; oscillators; semiconductor device measurement; substrates; thin film circuits; thin film transistors; training; CMOS like thin film transistor circuits; VLSI CMOS circuits; clean room; complementary metal-oxide semiconductor; dynamic electrical characterization; dynamic parameters measurement; fall time measurement; glass substrate; microelectronics center; oscillator frequency measurement; rise time measurement; thin film transistor circuits electrical characteristics; thin film transistor technology; training; very large scale integration; CMOS technology; Circuits; Frequency measurement; Glass; Microelectronics; Oscillators; Semiconductor device modeling; Substrates; Thin film transistors; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Systems Education, 2003. Proceedings. 2003 IEEE International Conference on
Print_ISBN
0-7695-1973-3
Type
conf
DOI
10.1109/MSE.2003.1205233
Filename
1205233
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