Title :
A low voltage actuated micromachined microwave switch using torsion springs and leverage
Author :
Dooyoung Hah ; Euisik Yoon ; Songcheol Hong
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
A new push-pull configuration using torsion springs and leverage for low-voltage actuated microwave switch is proposed. It is fabricated by surface micromachining and has demonstrated switch operation up to 4 GHz. The actuation voltage is 6 V and an isolation has been achieved of more than 28 dB by the push-pull configuration.
Keywords :
low-power electronics; microactuators; micromachining; microstrip lines; microwave switches; 4 GHz; 6 V; actuated micromachined microwave switch; actuation voltage; isolation; leverage; push-pull configuration; surface micromachining; switch operation; torsion springs; Communication switching; Contacts; Electrodes; Electrostatics; Insertion loss; Low voltage; Microwave antenna arrays; Phased arrays; Springs; Switches;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.860913
