DocumentCode :
3530129
Title :
Etching characteristics of nuclear-reactor- simulated metal oxide films by pulsed Nd: YAG laser abla
Author :
Sate, S. ; Shimizu, K. ; Ishide, T. ; Maruyama, T.
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
230
Keywords :
Annealing; Chemical lasers; Corrosion; Decontamination; Etching; Gas lasers; Laser ablation; Neodymium; Optical pulses; Polarization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527183
Filename :
527183
Link To Document :
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