Title :
Magnetic RF integrated thin-film inductors
Author :
Yamaguchi, M. ; Baba, M. ; Suezawa, K. ; Moizumi, T. ; Arai, K.I. ; Shimada, Y. ; Haga, A. ; Tanabe, Shigeo ; Ito, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
The magnetic thin film inductor with a 4-turn, 337/spl times/337 /spl mu/m/sup 2/ size spiral coil showed inductance 21% larger than the air core´s while its quality factor was lower than the air core´s. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.
Keywords :
MMIC; Q-factor; UHF integrated circuits; coils; inductors; magnetic microwave devices; magnetic thin film devices; MMIC; RF integrated thin-film inductors; fabrication process; inductance enhancement; integrated semiconductor devices; magnetic thin film inductor; micro patterned magnetic film inductor; passivation layer; quality factor; spiral coil; Coils; Inductance; Magnetic cores; Magnetic films; Passivation; Q factor; Radio frequency; Semiconductor devices; Spirals; Thin film inductors;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.860942
