Title :
Effect of underlayer structure on the properties of NdFeB thin films
Author :
Okumoto, T. ; Yamasawa, K. ; Liu, X. ; Morisako, A. ; Matsumoto, M.
Author_Institution :
Fac. of Eng., Shinshu Univ., Nagano, Japan
Abstract :
In this experiment, the detailed W underlayer preparation condition and its influence on the properties of NdFeB films have been studied. Crystallized NdFeB film was deposited onto a glass substrate with W underlayer at 450°C. The magnetic properties of the films sensitively depended on the substrate temperature of the underlayer. The thickness of the film was 15 nm. The film were characterized by X-ray diffractometry (XRD), vibrating sample magnetometer (VSM) and scanning electron microscopy (SEM). The results concluded that the improvement of the underlayer crystallinity is crucial for fabrication of NdFeB films with perpendicular magnetic anisotropy.
Keywords :
X-ray diffraction; boron alloys; iron alloys; magnetic anisotropy; magnetic thin films; magnetometers; metallic thin films; neodymium alloys; scanning electron microscopy; 15 nm; 450 degC; NdFeB; NdFeB thin films; SEM; XRD; crystallinity; glass substrate; magnetic anisotropy; substrate temperature; underlayer structure; vibrating sample magnetometer; Crystallization; Glass; Magnetic films; Magnetic properties; Scanning electron microscopy; Substrates; Temperature dependence; Temperature sensors; Transistors; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463725
