DocumentCode :
3531747
Title :
A Modular Structure For A Highly Detailed Model Of Semiconductor Manufacturing
Author :
Hood, S.J. ; Amamoto, A.F.B.
Author_Institution :
T.J. Watson Research Center
fYear :
1989
fDate :
4-6 Dec 1989
Firstpage :
811
Lastpage :
817
Keywords :
Circuits; Discrete event simulation; Etching; Flexible manufacturing systems; Job shop scheduling; Resists; Semiconductor device manufacture; Switches; User interfaces; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference Proceedings, 1989. Winter
Print_ISBN :
0-911801-58-8
Type :
conf
DOI :
10.1109/WSC.1989.718758
Filename :
718758
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3531747
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